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Search - Atomic Layer Deposition for Nanotechnology
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Atomic Layer Deposition for Nanotechnology Author: This monograph is the first text to review the subject of Atomic Layer Deposition (ALD) comprehensively. It not only covers its application to microelectronics, but also many important new and emerging applications in Nanotechnology. It is the culmination of over 10 years of pioneering research and development by the author. Not only does it cov... more »
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