Beam Technologies for Integrated Processing, Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems, Commission on Engineering and Technical Systems, National Research Council. (Paperback 0309046351)

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Beam Technologies for Integrated Processing
Author: Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems, Commission on Engineering and Technical Systems, National Research Council

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This... more »

ISBN-13: 9780309046350
ISBN-10: 0309046351
Publication Date: 1/1/1992
Pages: 106
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Publisher: National Academies Press
Book Type: Paperback
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