Search - Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications (Materials Science and Process Technology)

Chemical Vapor Deposition for Microelectronics Principles Technology and Applications - Materials Science and Process Technology Author: Arthur Sherman Presents an extensive, comprehensive study of chemical vapor deposition (CVD). Understanding CVD requires knowledge of fluid mechanics, plasma physics, chemical thermodynamics and kinetics, as well as homogenous and heterogeneous chemical reactions. This text presents these aspects of CVD in an integrated fashion, and also reviews films for use ...  more »in integrated circuit technology.  « less Post This Book Login | Register ISBN-13: 9780815511366 ISBN-10: 0815511361 Publication Date: 3/1/1988 Pages: 226 Rating: Currently 0/5 Stars.   ? 0 stars, based on 0 rating Publisher: Noyes Publications Book Type: Hardcover Members Wishing: 0 Reviews: Amazon | Write a Review

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