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Fundamentals of Semiconductor Manufacturing and Process Control
Fundamentals of Semiconductor Manufacturing and Process Control
Author: Gary S. May, Costas J. Spanos
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design — Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling,...  more »
ISBN-13: 9780471784067
ISBN-10: 0471784060
Publication Date: 5/22/2006
Pages: 488
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Publisher: Wiley-IEEE Press
Book Type: Hardcover
Members Wishing: 0
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