Skip to main content
PBS logo
 
 

Search - Lecture Notes on Principles of Plasma Processing

Lecture Notes on Principles of Plasma Processing
Lecture Notes on Principles of Plasma Processing
Author: Francis F. Chen, Jane P. Chang
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who hav...  more »
ISBN-13: 9780306474972
ISBN-10: 0306474972
Publication Date: 1/31/2003
Pages: 208
Rating:
  ?
0 stars, based on 0 rating
Publisher: Plenum US
Book Type: Paperback
Members Wishing: 0
Reviews: Amazon | Write a Review


Genres:


Back to the Top ↑
By using this Web site, you confirm that you have read, understood, and agreed to be bound by the Terms of Use. As an Amazon Associate we earn from qualifying purchases.
US Patent Number 7,877,315 | Copyright © 2004 - 2024 PaperBackSwap.com. All Rights Reserved.