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Lecture Notes on Principles of Plasma Processing
Lecture Notes on Principles of Plasma Processing
Author: Francis F. Chen, Jane P. Chang
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who hav...  more »
ISBN-13: 9780306474972
ISBN-10: 0306474972
Publication Date: 1/31/2003
Pages: 208
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Publisher: Plenum US
Book Type: Paperback
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