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MEMS and Microsystems: Design and Manufacture
MEMS and Microsystems Design and Manufacture
Author: Tai-Ran Hsu, Tai-Ran Hsu
Microsystems and MEMS technology represents one of the biggest breakthroughs in the area of mechanical and electronic technology to occur in recent years. This is the technology of extremely small and powerful devices – and systems built around such devices – which have mechanical and electrical components. MEMS technology is beginni...  more »
ISBN-13: 9780072393910
ISBN-10: 0072393912
Publication Date: 11/9/2001
Pages: 448
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Publisher: McGraw-Hill Science/Engineering/Math
Book Type: Hardcover
Other Versions: Paperback
Members Wishing: 0
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