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Microwave Excited Plasmas (Plasma Technology, Vol 4)
Microwave Excited Plasmas - Plasma Technology, Vol 4
Author: Michel Moisan
Hardbound. The contrasting examples of microwave plasmas given in this volume demonstrate their capability of not only covering the totality of expressed needs in that particular field, but in many others. For example the ions and reactive neutral species, indispensable for the synergetic effects in etching and deposition processes can be used i...  more »
ISBN-13: 9780444888150
ISBN-10: 0444888152
Publication Date: 11/1/1992
Pages: 538
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Publisher: Elsevier Science Pub Co
Book Type: Hardcover
Members Wishing: 0
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