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Optical Diagnostics for Thin Film Processing
Optical Diagnostics for Thin Film Processing
Author: Irving P. Herman
This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical pro...  more »
ISBN-13: 9780123420701
ISBN-10: 0123420709
Publication Date: 1/15/1996
Pages: 783
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Publisher: Academic Press
Book Type: Hardcover
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