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Principles of Plasma Discharges and Materials Processing
Principles of Plasma Discharges and Materials Processing
Author: Michael A. Lieberman, Allan J. Lichtenberg
Timely, authoritative, pedagogically consistent— a valuable professional resource and a superior didactic tool. Authored by two internationally respected pioneers in the field, this book offers a fully integrated, pedagogically consistent presentation of the fundamental physics and chemistry of partially ionized, chemically reactive, low-pr...  more »
ISBN-13: 9780471005773
ISBN-10: 0471005770
Publication Date: 10/14/1994
Pages: 600
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Publisher: Wiley-Interscience
Book Type: Hardcover
Members Wishing: 0
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