Skip to main content
PBS logo
 
 

Search - The Science and Engineering of Microelectronic Fabrication (Oxford Series in Electrical Engineering)

The Science and Engineering of Microelectronic Fabrication (Oxford Series in Electrical Engineering)
The Science and Engineering of Microelectronic Fabrication - Oxford Series in Electrical Engineering
Author: Stephen A. Campbell
An introduction to microelectronic processing intended for a wide audience, this book covers the physics, chemistry, and technology involved in all basic unit processes employed in the production of integrated circuits, from photolithography through plasma and reactive ion etching to chemical vapor deposition. Advanced processing methods--includ...  more »
ISBN-13: 9780195105087
ISBN-10: 0195105087
Publication Date: 2/29/1996
Pages: 536
Rating:
  ?
0 stars, based on 0 rating
Publisher: Oxford University Press
Book Type: Hardcover
Members Wishing: 0
Reviews: Amazon | Write a Review



Back to the Top ↑
By using this Web site, you confirm that you have read, understood, and agreed to be bound by the Terms of Use. As an Amazon Associate we earn from qualifying purchases.
US Patent Number 7,877,315 | Copyright © 2004 - 2024 PaperBackSwap.com. All Rights Reserved.