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Silicon Microengineering
Silicon Microengineering
Author: Young
Microengineering technology is beginning to emerge from the laboratory into the commercial world, and promises improvments in the cost, size and performance of devices used for sensing and measuring physical and chemical parameters. Future applications could have far reaching effects in diverse fields where miniaturization is an advantage, inclu...  more »
ISBN-13: 9780412362705
ISBN-10: 0412362708
Publication Date: 5/15/1998
Pages: 448
Edition: 1
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Publisher: Springer
Book Type: Hardcover
Members Wishing: 0
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