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Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
Silicon Micromachining - Cambridge Studies in Semiconductor Physics and Microelectronic Engineering
Author:
This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion ... more »
Author:
This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion ... more »
ISBN-13: 9780521590549
ISBN-10: 052159054X
Publication Date: 5/13/1999
Pages: 420
Rating: ?
ISBN-10: 052159054X
Publication Date: 5/13/1999
Pages: 420
Rating: ?
0 stars, based on 0 rating
Publisher: Cambridge University Press
Book Type: Hardcover
Other Versions: Paperback
Members Wishing: 0
Reviews: Amazon | Write a Review
Book Type: Hardcover
Other Versions: Paperback
Members Wishing: 0
Reviews: Amazon | Write a Review
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