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Search - Spectroscopic Ellipsometry and Reflectometry : A User's Guide

Spectroscopic Ellipsometry and Reflectometry : A User's Guide
Spectroscopic Ellipsometry and Reflectometry A User's Guide
Author: Harland G. Tompkins, William A. McGahan
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and r...  more »
ISBN-13: 9780471181729
ISBN-10: 0471181722
Publication Date: 3/4/1999
Pages: 248
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Publisher: Wiley-Interscience
Book Type: Hardcover
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