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Atomic Layer Epitaxy
Atomic Layer Epitaxy
Author:
Atomic layer epitaxy is a method for the production of high quality, thin, solid films of specific crystal structures or orientations. It allows very fine control of film thicknesses to one atomic layer, and has attracted attention in areas such as thin film ceramics, gas sensors, radiation detectors, optical/infrared filters, anti-corrosion sur... more »
Author:
Atomic layer epitaxy is a method for the production of high quality, thin, solid films of specific crystal structures or orientations. It allows very fine control of film thicknesses to one atomic layer, and has attracted attention in areas such as thin film ceramics, gas sensors, radiation detectors, optical/infrared filters, anti-corrosion sur... more »
ISBN-13: 9780216925748
ISBN-10: 0216925746
Publication Date: 10/31/1989
Pages: 280
Edition: 1
Rating: ?
ISBN-10: 0216925746
Publication Date: 10/31/1989
Pages: 280
Edition: 1
Rating: ?
0 stars, based on 0 rating
