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Search - Effect of Disorder and Defects in Ion-Implanted Semiconductors: Electrical and Physiochemical Characterization (Semiconductors and Semimetals)

Effect of Disorder and Defects in Ion-Implanted Semiconductors: Electrical and Physiochemical Characterization (Semiconductors and Semimetals)
Effect of Disorder and Defects in IonImplanted Semiconductors Electrical and Physiochemical Characterization - Semiconductors and Semimetals
Author: Constantinos Christofides, Gerard Ghibaudo
Defects in ion-implanted semiconductors are important and will likely gain increased importance in the future as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need to be addressed. Publications in t...  more »
ISBN-13: 9780127521459
ISBN-10: 0127521453
Publication Date: 4/22/1997
Pages: 300
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Publisher: Academic Press
Book Type: Hardcover
Members Wishing: 0
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