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Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Engineering)
Fabrication Engineering at the Micro and Nanoscale - The Oxford Series in Electrical and Computer Engineering
Author: Stephen A. Campbell
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic u...  more »
ISBN-13: 9780195320176
ISBN-10: 0195320174
Publication Date: 9/17/2007
Pages: 672
Edition: 3
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Publisher: Oxford University Press, USA
Book Type: Paperback
Members Wishing: 0
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