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Fundamentals of Semiconductor Fabrication
Fundamentals of Semiconductor Fabrication
Author: Gary S. May, Simon M. Sze
Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence — Presents comprehensive coverage of process sequences — Introduces readers to modern simulation tools — Addresses the practical aspects of integrated circuit fabricatio...  more »
ISBN-13: 9780471232797
ISBN-10: 0471232793
Publication Date: 4/4/2003
Pages: 352
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Publisher: Wiley
Book Type: Hardcover
Members Wishing: 0
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