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High Resolution Focused Ion Beams : FIB and Applications
High Resolution Focused Ion Beams FIB and Applications Author:Jon Orloff, Lynwood Swanson, Mark Utlaut In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field em... more »ission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject. We have tried to cover the essential topics needed to understand what FIB technology is, how and why it works, and how it is applied. To this end we have included a chapter on the physics of the LMIS that includes a lot of practical information on these important ion sources, and two chapters that provide an introduction to ion optics and a `practical' discussion of ion optics as it is used in the FIB system today. Because FIBs are so often used to alter materials we have included a chapter on the interaction of ions with matter. The final chapter is a comprehensive coverage of FIB applications up to the year 2000.« less