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Introduction to Semiconductor Manufacturing Technology (SPIE Press Monograph PM220)
Introduction to Semiconductor Manufacturing Technology - SPIE Press Monograph PM220
Author: Hong Xiao
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and phy...  more »
ISBN-13: 9780819490926
ISBN-10: 081949092X
Publication Date: 10/12/2012
Pages: 704
Edition: 2
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Publisher: Society of Photo Optical
Book Type: Hardcover
Members Wishing: 0
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