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Introduction to Sims for Surface and Thin Film Analysis
Introduction to Sims for Surface and Thin Film Analysis Author:J. F Watts The book provides a basic introduction to SIMS, covering both the science behind the subject, and the instrumentation and techniques available. Following a scene-setting introduction, the process of sputtering and ion formation is covered in Chapter 2. Instrumentation, analytical applications, techniques and data processing are covered in the fo... more »llowing chapters, before concluding by summing up the advantages and disadvantages of SIMS in relation to other analytical methods« less