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MOS (Metal Oxide Semiconductor) Physics and Technology
MOS Physics and Technology - Metal Oxide Semiconductor
Author: E. H. Nicollian, J. R. Brews
Explains the theoretical and experimental foundations of the measurement of the electrical properties of the MOS system and the technology for controlling its properties. Emphasizes the silica and the silica-silicon interface. Provides a critical assessment of the literature, corrects incomplete or incorrect theoretical formulations, and gives c...  more »
ISBN-13: 9780471085003
ISBN-10: 0471085006
Publication Date: 3/4/1982
Pages: 928
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Publisher: Wiley-Interscience
Book Type: Hardcover
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