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Microelectronic Structures and Microelectromechanical Devices: 24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society for Optical Engineering, V. 2641.)
Microelectronic Structures and Microelectromechanical Devices 24 October 1995 Austin Texas - Proceedings of Spie--the International Society for Optical Engineering, V. 2641. Author:Bailey, National Institute of Standards and Technology (U.S.)
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