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Microsensors: Principles and Applications
Microsensors Principles and Applications Author:Julian W. Gardner The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors--the processing of materials for their fabrication; the wide range of physical, chemical and mechani... more »cal principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.« less