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Organometallic Vapor-Phase Epitaxy: Theory and Practice
Organometallic VaporPhase Epitaxy Theory and Practice
Author: Gerald B. Stringfellow
Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecul...  more »
ISBN-13: 9780126738407
ISBN-10: 0126738408
Publication Date: 8/11/1989
Pages: 398
Edition: First Edition
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Publisher: Academic Press
Book Type: Hardcover
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