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Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
Plasma Processes for Semiconductor Fabrication - Cambridge Studies in Semiconductor Physics and Microelectronic Engineering
Author: W. N. G. Hitchon
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled. The author begins with an ov...  more »
ISBN-13: 9780521018005
ISBN-10: 0521018005
Publication Date: 9/29/2005
Pages: 231
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Publisher: Cambridge University Press
Book Type: Paperback
Members Wishing: 0
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