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Semiconductor Measurements and Instrumentation
Semiconductor Measurements and Instrumentation
Author: W. R. Runyan, T. J. Shaffner
The definitive reference on semiconductor characterization tools! Here, in one well-organized volume, are detailed explanations of the advanced and "traditional") techniques for evaluating virtually every criterion: crystal defects, impurity concentration, lifetime, film thickness, resistivity, and such critical electrical properties as mobility...  more »
ISBN-13: 9780070576971
ISBN-10: 0070576971
Publication Date: 2/1/1998
Pages: 454
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Publisher: McGraw-Hill Professional
Book Type: Hardcover
Members Wishing: 0
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