Silicon VLSI Technology - 2nd Edition Author:James D. Plummer, Michael Deal, Peter D. Griffin For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underl... more »ying scientific basis for those technologies.« less