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1997 9th International Conference on Indium Phosphide and Related Materials
1997 9th International Conference on Indium Phosphide and Related Materials
Author: IEEE Electron Devices Society, IEEE, IEEE Lasers & Electro-Optics Society
This text examines test structures for microelectronic devices, their recent progress and future directions. Topics highlighted include: process characterization, dimensional measurements, interconnection, material characterization, reliability, device characterization and statistics.
ISBN-13: 9780780338982
ISBN-10: 0780338987
Pages: 692
Edition: 1997
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Publisher: Institute of Electrical & Electronics Enginee
Book Type: Paperback
Members Wishing: 0
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