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2002 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Boston, Massachusetts, Usa, April 30-May 2, 2002
2002 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop Boston Massachusetts Usa April 30May 2 2002 Author:IEEE This text originated from the 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop, and examines the manufacture of circuits and devices. Topics covered include: advanced meteorology; cost reduction; MEMS technology; time-to-market; and factory automation.