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Chemical Mechanical Polishing in Silicon Processing (Semiconductors and Semimetals)
Chemical Mechanical Polishing in Silicon Processing - Semiconductors and Semimetals
Author: Shin M. Hwa Li, Robert M. Miller
Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did m...  more »
ISBN-13: 9780127521725
ISBN-10: 0127521720
Publication Date: 10/15/1999
Pages: 307
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Publisher: Academic Press
Book Type: Hardcover
Members Wishing: 0
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