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Fundamentals of  Nanoscale Film Analysis
Fundamentals of Nanoscale Film Analysis
Author: Terry L. Alford, L.C. Feldman, James W. Mayer
Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on analysis of the s...  more »
ISBN-13: 9780387292601
ISBN-10: 0387292608
Publication Date: 2/16/2007
Pages: 330
Edition: 1
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Publisher: Springer
Book Type: Hardcover
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