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Multilayer Integrated Film Bulk Acoustic Resonators
Multilayer Integrated Film Bulk Acoustic Resonators
Author: Yafei Zhang, Da Chen
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators...  more »
ISBN-13: 9783642317750
ISBN-10: 3642317758
Publication Date: 8/28/2012
Pages: 162
Edition: 2013
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Publisher: Springer
Book Type: Hardcover
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