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Process Engineering: Analysis in Semiconductor Device Fabrication
Process Engineering Analysis in Semiconductor Device Fabrication
Author: Stanley Middleman, Arthur Hochberg
This new text is written primarily for chemical engineering students. Worked examples illustrate how one uses fundamental principles to model processes. Where possible, models are compared to experimental data and the success and/or failure of a model is presented as a learning experience. Much of the text involves new material presented with a ...  more »
ISBN-13: 9780070418530
ISBN-10: 0070418535
Publication Date: 1/1/1993
Pages: 672
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Publisher: Mcgraw-Hill College
Book Type: Hardcover
Members Wishing: 0
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