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RF Power for Industrial Applications
RF Power for Industrial Applications
Author: Louis E. Frenzel
For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power. This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for proces...  more »
ISBN-13: 9780130965776
ISBN-10: 0130965774
Publication Date: 5/31/2003
Pages: 288
Edition: 1
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Publisher: Prentice Hall
Book Type: Hardcover
Members Wishing: 0
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