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Soft X-Rays and Extreme Ultraviolet Radiation : Principles and Applications
Soft XRays and Extreme Ultraviolet Radiation Principles and Applications
Author: David Attwood
This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles ...  more »
ISBN-13: 9780521652148
ISBN-10: 0521652146
Publication Date: 8/28/1999
Pages: 486
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Publisher: Cambridge University Press
Book Type: Hardcover
Other Versions: Paperback
Members Wishing: 0
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