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Statistical Metrology, 1998 3rd Workshop
Statistical Metrology 1998 3rd Workshop
Author: IEEE Electron Devices Society, IEEE
This Workshop focuses on issues such as the generalization and utilization of statistically significant measurements to characterize and validate VLSI processes, designs, and equipment operations. "~"Metrology for Statistical Process Control (SPC); Yield Ramping Methodology in Pre-Production Phase; Sensor and Measurement Technology; Short-Flow ...  more »
ISBN-13: 9780780343382
ISBN-10: 0780343387
Publication Date: 7/1998
Pages: 121
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Publisher: Institute of Electrical Electronics Enginee
Book Type: Paperback
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